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魅麗。花火原創小說66折起
Cluster Ion-Solid Interactions ─ Theory, Simulation, and Experiment
90折

Cluster Ion-Solid Interactions ─ Theory, Simulation, and Experiment

定  價:NT$ 9750 元
優惠價:908775
若需訂購本書,請電洽客服 02-25006600[分機130、131]。
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商品簡介

An important tool for nanoscale material processing, gas cluster ion beam (GCIB) technology uses charged cluster ions for modifying surfaces. Co-authored by the inventor of this technology, this book gives a balanced treatment of the theory, simulation methods, experimental techniques, and emerging applications. The authors discuss the impact of GCIB technology on the semiconductor industry, including its use in shallow junction formation, etching and smoothing of semiconductors, assisted formation of thin films with nanoscale accuracy, and other surface modification applications.

作者簡介

Zinetula Insepov is an adjunct professor at Purdue University, a professor at the Moscow Engineering Physics Institute, a founding faculty fellow of the Skolkovo Institute of Science and Technology (Skoltech), and a chief scientist at the Nazarbayev University Research and Innovation System. He has previously held positions at Kyoto University, Epion Japan, and Argonne National Laboratory. His research focuses on the fundamental physics of ion beam materials processing, including very-low-energy ion–solid interactions. He developed cluster ion beam interaction simulation programs based on molecular dynamics and Monte Carlo methods. He also predicted a new lateral sputtering phenomenon that is a driving force behind the efficient atomistic smoothening mechanism of surfaces irradiated by large gas cluster ions.

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優惠價:90 8775
若需訂購本書,請電洽客服 02-25006600[分機130、131]。

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