Microlithography ― Science and Technology
- 系列名：Opitcal Science and Engineering
- ISBN13：9780824790240
- 出版社：CRC Pr I Llc
- 作者：Kazuaki Suzuki (EDT); Bruce W. Smith (EDT)
- 裝訂／頁數：精裝／848頁
- 規格：26cm*18.4cm*4.4cm (高/寬/厚)
- 版次：2
- 出版日：2007/05/09
商品簡介
New in the Second Edition
In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including:
- Immersion Lithography
- 157nm Lithography
- Electron Projection Lithography (EPL)
- Extreme Ultraviolet (EUV) Lithography
- Imprint Lithography
- Photoresists for 193nm and Immersion Lithography
- Scatterometry
Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition.
Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.
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