Proceedings of the April 1996 symposium. Eighty-some contributions are arranged in sections on mechanical properties of films and multilayers, fracture and adhesion, nanindentation of films and surfac
Papers presented at the title symposium, held at the 1994 Fall Meeting of the MRS. The topics of the six invited papers: stress and its effect on intermixing in Si 1 - xGe x/Si superlattices; aspects