MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come ne
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this per
Devoted to the investigation of materials behavior and device issues at the micro-, nano-, and molecular level as well as the behavior and interface between micro-, nano-, and molecular devices, this