Devoted to the investigation of materials behavior and device issues at the micro-, nano-, and molecular level as well as the behavior and interface between micro-, nano-, and molecular devices, this
Forty-three contributions from the 2001 conference focus on the materials science of MEMS structures and the films to create those structures. MEMS has application to markets in pressure sensors, gyro
In these proceedings for the symposium held March and April 2005, contributors describe their work in the mechanical behavior of thin films, broadly applied to their material's choice or methodology.
