Microsystem Engineering of Lab-on-a-Chip Devices

Oliver Geschke graduated in chemistry in 1994 from the University of Munster, Germany, where he also wrote his PhD theses. In December 1998 he joined the Department of Micro-and Nanotechnology at the Technical University of Denmark (DTU), Kgs. Lyngby, Denmark. Here, he first worked as an assistant professor on a European project on wastewater analyzers and in 2001 became Associated Professor. Since then he has been heading a research group "Polymeric Enabling Microsystems, POEM" mainly focusing on inexpensive polymer microfluidic systems and sensors. He has three textbooks, about 20 journal papers, some 70 conference proceedings and three patents to h is name. Apart from his teaching duties at DTU, he has taught several national and international courses - mostly on subjects covered in this book.

Henning Klank gained h is MSc in physics from Ludwig-Maximilians University,Munich, Germany in 1993 and his PhD in electronics from Massey University, Palmerston North, New Zealand in 1999, where he subsequently worked first as a junior lecturer in electronics and then as an instrumentation scientist for two years. From 2000 to 2006 he was Assistant Professor in the Micro Total Analysis System group at the Technical University of Denmark, before working as a freelancer with his own company and as a consultant to several others. In 2008 Dr. Klank returned to Massey University as a lecturer. His main field of interest is instrumentation with a focus on the three main topics of electronics, optics and vibration damping, while also generally being involved in improving signal-to-noise-ratios.

Pieter Telleman received his MSC in biochemistry from the University of Nijmegen,The Netherlands, in 1990 and his PhD in medicine from the University of Amsterdam in 1995. Following a fellowship award from the United States Army Medical Research Institute for Infectious Diseases, Fort Detrick, MD, USA, he joined the Harvard Institutes of Medicine, Boston, MA, and Subsequently assumed fellowship positions in clinical oncology and experimental pathology at Harvard Medical School. he was appointed professor in Bio/Chemical MicroSystems at the Technical University of Denmark in 2001 where he took on the position of the director of the Department of Micro-and nanotechnology two years later. his research focuses on the commercialization of micro-and nanotechnology as well as its application to chemistry and life sciences.

Preface.

1. Introduction (Pieter Telleman).
1.1. Learning from the Experiences of Microelectronics.
1.2. The Advantages of Miniaturizing Systems for Chemical Analysis.
1.3. From Concept to µTAS.
1.4. References.

2. Clean Rooms (Daria Petersen and Pieter Telleman).

3. Microfluidics - Theoretical Aspects (Jörg P. Kutter and Henning Klank).
3.1. Fluids and Flows.
3.2. Transport Processes.
3.3. System Design.
3.4. An Application: Biological Fluids,.
3.5. References.

4. Microfluidics - Components (Jörg P. Kutter, Klaus Bo Mogensen, Henning Klank, and Oliver Geschke).
4.1. Valves and Pumps.
4.2. Injecting, Dosing, and Metering.
4.3. Temperature Measurement in Microfluidic Systems.
4.4. Optical Sensors.
4.5. Electrochemical Sensors.
4.6. References.

5. Simulations in Microfluidics (Goran Goranovic and Henrick Bruus).
5.1. Physical Aspects and Design.
5.2. Choosing Software and Hardware.
5.3. Important Numerical Settings.
5.4. Errors and Uncertainties.
5.5. Interpretation and Evaluation of Simulations.
5.6. Example Simulations.
5.7. References.

6. Silicon and Cleanroom Processing (Anders Michael Jorgensen and Klaus Bo Mogensen).
6.1. Substrate Fabrication.
6.2. Optical Lithography.
6.3. Deposition.
6.4. Etching.
6.5. Dry Etching.
6.6. Heat Treatment.
6.7. References.

7. Glass Micromachining (Daria Petersen, Klaus Bo Mogensen, and Henning Klank).
7.1. Wet Chemical Etching.
7.2. Reactive Ion Etching (RIE) of Glass.
7.3. Laser Patterning.
7.4. Powder Blasting.
7.5. Glass Bonding.
7.6. A Microfabrication Example.
7.7. References.

8. Polymer Micromachining (Oliver Geschke, Henning Klank, and Klaus Bo Mogensen.
8.1. Hot Embossing.
8.2. Injection Molding.
8.3. Casting.
8.4. Laser Micromachining.
8.5. Milling.
8.6. X-ray and Ultraviolet Polymer Lithography.
8.7. Sealing of Polymer Microstructures.
8.8. Adding Functionalities.
8.9 Examples of Polymer Microstructures.
8.10. References.

9. Packaging of microfluidic Systems (Gerardo Perozziello).
9.1. Levels of packaging.
9.2. Factors influencing the packaging design and reliability.
9.3. Materials.
9.4. Interconnections.
9.5. References.

10. Determination of Topography (Henning Klank).
10.1. Topography - General Discussion.
10.2. Importance and Relevance of Topography.
10.3. Topographical Determination Considerations.
10.4. Topographical Characterization Methods and Instruments.
10.5. Topographical Examination of a Typical Sample.
10.8 References.

11. Analytical Chemistry on Microsystems (Jörg Kutter and Oliver Geschke).
11.1. Sensors and Sensor Systems.
11.2. Biosensors.
11.3. Flow Injection Analysis.
11.4. Separation Techniques.
11.5. Other Analytical Techniques.
11.6. References.
Subject Index.