Electrical Characterization of Silicon-On-Insulator Materials and Devices

Electrical Characterization of Silicon-on-Insulator Materials and Devices describes a wide variety of electrical characterization methods, from wafer screening and defect identification to detailed device evaluation. Each technique comes with pertinent technical information -- experimental set-up, basic models, parameter extraction -- that can be immediately useful to the reader. Electrical Characterization of Silicon-on-Insulator Materials and Devices provides a comprehensive and accessible treatment of all aspects of the latest SOI technologies, including material synthesis, device physics, characterization, circuit applications, and reliability issues. Both the academic researchers and engineers working on the SOI technology will find this book invaluable as a source of pertinent scientific information, practical details, and references. For people planning to enter the SOI field, this book offers a unique coverage of the SOI technology and an attractive presentation of the underlying concepts. This book may also be used as a graduate level textbook for students who wish to learn more about the physics, applications, and electrical characterization of SOI devices.