Advances in Multiphysics Simulation and Experimental Testing of MEMS

Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) may be ubiquitous already, but there is still plenty of room for more, and for better simulation and experimental testing procedures. These 13 extended chapters cover the newest topics in multiphysics simulation and testing, including the challenges in modeling liquid and gas flows in micro/nano devices, using kinetic equations for MEMS and NEMS, applying the direct simulation Monte Carlo method to gas-filled MEMS devices, simulation of micro-fluidics, gas damping in MEMS using fast integral equations solvers, experimental techniques for damping characterization, nonlinear dynamics of the electrostatically actuated MEMS, couple deformation analysis of thin MEMS plates, assessment of Coulomb and Casimir forces, numerical simulation of bioMEMS, continuous modeling of multiphysics problems of Microsystems for topology optimization, mechanical characterization of polysilicon, and testing of nano wires and tubes. Distributed by World Scientific. Annotation c2008 Book News, Inc., Portland, OR (booknews.com)