Thin Films:Stresses and Mechanical Properties IV:VOLUME308
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系列名:MRS Proceedings
ISBN13:9781558992047
出版社:CAMBRIDGE UNIVERSITY PRESS
作者:Edited by Peter Børgesen ; John E. Sanchez; Jr. ; Paul H. Townsend ; Timothy P. Weihs
出版日:1993/10/27
裝訂:平裝
版次:1
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Proceedings of the title symposium, held at the 1993 Spring Meeting of the MRS in San Francisco. The papers are arranged in nine sections following the topical outline upon which the symposium was organized: stresses in thin films; measuring stresses and mechanical properties new techniques and developments; stress, electromigration, and voiding in fine line structures; stress relaxation mechanisms and thin film morphology; mechanics and microstructure in epitaxial layers; mechanical behavior of polymer coatings; mechanical deformation of thin films the effects of microstructure and processing; fracture, adhesion, and wear of thin films the effects of microstructure and processing; and the mechanical deformation of multilayer thin films. Annotation copyright Book News, Inc. Portland, Or.
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