Materials Synthesis and Processing using Ion Beams：VOLUME316

Papers presented at the title symposium of the 1993 MRS Fall Meeting in Boston are arranged topically in four sections: radiation damage and related phenomena (damage production and morphology/thermally activated processes annealing, gettering, and diffusion/beam-induced phase transformations ion beam mixing, amorphization, and crystallization); materials modification by implantation doping (electrical/optical/tribological/characterization, simulation, implantation equipment); ion beam synthesis by high-dose implantation; and low-energy ion effects (direct or assisted thin-film deposition by ion beams/physical effects sputtering, etching, doping, and damage). Annotation copyright Book News, Inc. Portland, Or.