Ferroelectric Thin Films VII:VOLUME541
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系列名:MRS Proceedings
ISBN13:9781558994478
出版社:Cambridge University Press
作者:Edited by Robert E. Jones ; Robert W. Schwartz ; Scott R. Summerfelt ; In K. Yoo
出版日:1999/06/07
裝訂/頁數:平裝/770頁
版次:1
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Collects 113 papers presented at the December 1998 symposium. Recent results are introduced for DRAM and FERAM devices, as well as enhancements in material performance for these applications. Advances in meeting challenging integration issues facing the development of these devices are discussed, such as new electrode technologies, annealing procedures, and fabrication methods. The development of ferroelectric thin films for piezoelectric, pyroelectric, and optical applications are also reviewed. Other topical sessions focus on improved film fabrication procedures including chemical vapor deposition and chemical solution deposition and understanding material performance. Annotation c. Book News, Inc., Portland, OR (booknews.com)
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