Charged Particle Optics Theory ─ An Introduction

This book provides an introduction to theoretical optics of charged particle beams. It identifies the most important ideas of charged particle optics and derives them mathematically from the first principles of physics for the non-expert comfortable with calculus. It conveys an intuitive understanding of the basics and follows a logical step-by-step approach. After the introduction describing a number of practical systems, the book moves into geometrical optics, wave optics, diffraction and interference, two body scattering problems, and electron emission.

Timothy R. Groves is empire innovation professor of nanoscale science (2007 – 2014) at the College of Nanoscale Science and Engineering, SUNY Institute of Technology, State University of New York. Prior to this, he worked in industrial research and development at Vistec Lithography (2005 – 2007), Leica Microsystems (2000 – 2005), IBM’s Semiconductor Research and Development Center (1983 – 2000), Hewlett Packard Labs (1978 – 1983), and Zenith Corporation (1976 – 1978). He also served as consulting professor of electrical engineering at Stanford University (1998 – 2007). He holds a BS in physics from Stanford University, and an MS and Ph.D in physics from the University of Chicago.