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Chemical supply unit capable of automatically replacing a canister and a substrate treatment apparatus having the same: United States Patent 9989855
商品資訊
ISBN13：9798570698468
出版社：Independently published
作者：Sungmin Jang
出版日：2020/11/27
裝訂：平裝
規格：28cm*21.6cm*0.1cm (高/寬/厚)
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商品簡介
A substrate treatment apparatus includes a substrate treatment unit configured to provide a chemical solution to a substrate to treat the substrate, and a chemical supply unit configured to supply the chemical solution to the substrate treatment unit. The chemical supply unit includes a loader configured to load a canister containing the chemical solution to the chemical supply unit, a clamp configured to clamp the canister in place, a chemical supply line through which the chemical solution is supplied to the substrate treatment unit, and a coupler configured to couple the chemical supply line to the canister. The chemical supply unit is capable of automatically replacing the canister and the substrate.
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