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Scanning electron microscope and sample observation method: United States Patent 9991092
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ISBN13：9798573869513
出版社：Independently published
作者：Zhaohui Cheng
出版日：2020/12/03
裝訂：平裝
規格：28cm*21.6cm*0.1cm (高/寬/厚)
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A scanning electron microscope of the present invention performs scanning by changing a scanning line density in accordance with a sample when an image of a scanned region is formed by scanning a two-dimensional region on the sample with an electron beam or is provided with a GUI having sample information input means which inputs information relating to the sample and display means which displays a recommended scanning conditioHn according to the input and performs scanning with a scanning line density according to the sample by selecting the recommended scanning condition. As a result, in observation using a scanning electron microscope, a suitable scanning device which can improve contrast of a profile of a two-dimensional pattern and suppress shading by suppressing the influence of charging caused by primary charged particle radiation and by improving a detection rate of secondary electrons and a scanning method are provided.
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