Image sensor device structure: United States Patent 9991303
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ISBN13:9798584581435
出版社:Independently published
作者:Hung-Wen Hsu
出版日:2020/12/28
裝訂:平裝
規格:28cm*21.6cm*0.2cm (高/寬/厚)
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An image sensor structure is provided. The image sensor device structure includes a substrate, and the substrate includes an array region and a peripheral region. The image sensor device structure includes an anti-reflection layer formed on the substrate and a buffer layer formed on the anti-reflection layer. The image sensor device structure includes a first etch stop layer formed on the buffer layer and a metal grid structure formed on the first etch stop layer. The image sensor device structure also includes a dielectric layer formed on the metal grid structure.
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