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This book is part of a popular series on the materials science of MEMS devices. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there remains a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidic

Devoted to the investigation of materials behavior and device issues at the micro-, nano-, and molecular level as well as the behavior and interface between micro-, nano-, and molecular devices, this

These proceedings from the November 2006 symposium describe current trends, requirements and recent developments in electronic materials for applications in wireless (including RF, microwave, millimet

This proceedings volume surveys recent research in two rapidly developing fields: microsystems and nanosystems. Contributions from international materials scientists address a wide range of applicatio

This new volume in the well-established Late Antique Archaeology series draws together recent research by archaeologists and historians to shed new light on the religious world of Late Antiquity. A de