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Edited by David Hodul 、Jeffrey C. Gelpey 、Martin L. Green 、Thomas E. Seidel (1)
Edited by Jeffrey C. Gelpey 、J. Kiefer Elliott 、Jimmie J. Wortman 、Atul Ajmera (1)
Edited by Jeffrey C. Gelpey 、Martin L. Green 、Rajendra Singh 、Jimmie J. Wortman (1)
Edited by Steven R. J. Brueck 、Jeffrey C. Gelpey 、Ahman Kermani 、Jorgé L. Regolini 、James C. Sturm (1)
Edited by Steven R. J. Brueck 、Jeffrey C. Gelpey 、Martin L. Green 、Fred Roozeboom 、Jimmie J. Wortman (1)
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Rapid Thermal and Integrated Processing II:VOLUME303
90折
作者:Edited by Jeffrey C. Gelpey ; J. Kiefer Elliott ; Jimmie J. Wortman ; Atul Ajmera  出版社:Cambridge University Press  出版日:1993/07/28 裝訂:平裝
Interest in rapid thermal processing continues to grow as the demands on IC processing technology become more stringent. The papers that make up this volume were presented at a symposium of the 1993 S
無庫存,下單後進貨(到貨天數約30-45天)
定價:2254 元, 優惠價:9 2029
Rapid Thermal and Integrated Processing:VOLUME224
90折
作者:Edited by Jeffrey C. Gelpey ; Martin L. Green ; Rajendra Singh ; Jimmie J. Wortman  出版社:Cambridge University Press  出版日:1991/09/27 裝訂:平裝
Papers presented at a symposium of the MRS 1991 Spring Meeting in Anaheim, California on topics in temperature measurement in RTP systems, characterization of RTP structures, contacts and silicides, r
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定價:2254 元, 優惠價:9 2029
Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing:VOLUME146
90折
作者:Edited by David Hodul ; Jeffrey C. Gelpey ; Martin L. Green ; Thomas E. Seidel  出版社:Cambridge University Press  出版日:1989/11/03 裝訂:平裝
Papers from the symposium held April 1989, in San Diego cover recent developments in the "traditional" RTP subjects such as ion implant annealing in Si and III-V materials, metals processes (silicides
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定價:2254 元, 優惠價:9 2029
Rapid Thermal and Integrated Processing IV:VOLUME387
90折
The title symposium was held at the 1995 MRS Spring Meeting in San Francisco. The proceedings contain 56 invited and contributed papers with a focus on the manufacturing aspects of rapid thermal proce
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定價:1665 元, 優惠價:9 1499
Rapid Thermal and Integrated Processing III:VOLUME342
90折
Proceedings of an MRS symposium held in San Francisco in April 1994. The volume is divided into ten sections: temperature measurement; rapid thermal CVD-I SiGe; novel applications of RTP; rapid therma
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定價:1665 元, 優惠價:9 1499

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