Forty papers from a November 2001 Boston conference discuss advanced materials and processes for nanolithography, lithographic and nonlithographic methods of nanofabrication, nanostructures and nanofa
Contains 42 papers presented at the November/December 1999 Symposium J, "Advanced Materials and Techniques for Nanolithography," and Symposium N, "Atomic Scale Measurements and Atomistic Models of Epi