Hau-Riege (Lawrence Livermore National Laboratory, California) summarizes the current understanding of the interaction of x-rays with matter, focusing on high-intensity short-pulse radiation. He discu
Providing a solid theoretical background in photon-matter interaction, Nonrelativistic Quantum X-Ray Physics enables readers to understand experiments performed at XFEL-facilities and x-ray synchrotro
In addition to selecting a low-k material and integrating it into a copper damascene process, the 60 papers address novel processing of low-k materials, employing pore sealing techniques and capping l
